* Data-based control and monitoring of the lithography process using machine or measurement data
* Solving process or equipment problems in close cooperation with various departments or external suppliers
* Evaluating and implementing possible process simplifications/improvements to reduce manufacturing costs, increase process yield and improve product robustness
* Transferring new technologies to production in collaboration with R&D and process integration
* Interface with other technical areas (e.g. maintenance, R&D, line control, suppliers, etc.) and other relevant departments (e.g. quality)
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